Sensors and Actuators
Introduction and historical background, Micro sensors : Sensors and characteristics, Integrated Smart sensors, Sensor Principles/classification-Physical sensors (Thermal sensors, Electrical Sensors, tactile sensors, accelerometers, gyroscopes , Proximity sensors, Angular displacement sensors, Rotational measurement sensors, pressure sensors, Flow sensors, MEMS microphones etc.), Chemical and Biological sensors (chemical sensors, molecule-based biosensors, cell-based biosensors), Electromagnetic,Capacitive, Electromagneticand transduction Piezoelectric, Thermal piezo micro methods (Optical,

