Course
PostgraduateSemester
ElectivesSubject Code
AVM875Subject Title
Thin films: Materials and characterizationSyllabus
Material Science: introduction, structure, defects, bonds and bands, thermodynamics of material, kinetics, nucleation.
Thin film nucleation: Atomic view of substrate surfaces, thermodynamic aspects of Nucleation, Kinetic processes in Nucleation and growth.
Epitaxy: Lattice mismatch and defects in epitaxial film, epitaxy of compound semiconductors, High and low temp. methods of deposition.
Structural and chemical characterization of films and surfaces. XRD, TEM, AFM, SEM, Interdiffusion: compound formation, phase transformation in thin film, metal-semiconductor reaction, mass transport in thin film.
Mechanical properties of thin films: Mechanical testing and strength of thin films, analysis of internal stress
Text Books
Same as Reference
References
1. Micro- and Opto- Electronic Materials and Structures: Ephrahim Suhir, Y.C Lee, C. P Wong, Springer Publishers
2. Thin Film Phenomena: Kasturi L. Chopra, McGraw Hill, New York
3. Thin Film Device Applications: Kasturi L. Chopra, Indrajeet Kaur, Springer, USA
4. The Materials Science of Thin Films: Milton Ohring, Academic Press
5. Handbook of Thin Films Deposition Processes and Techniques: Principles, Methods, Equipment, and Applications: Klaus K. Schuegraf, Noyes Publications
6. Thin Film Physics: O. S. Heavens, Methuen publishers