Syllabus

Introduction and historical background, Microsensors : Sensors and characteristics, Integrated Smart sensors, Sensor Principles/classification-Physical sensors (Thermal sensors, Electrical Sensors, tactile sensors, accelerometers, gyroscopes , Proximity sensors, Angular displacement sensors, Rotational measurement sensors, pressure sensors, Flow sensors, MEMS microphones etc.), Chemical and Biological sensors (chemical sensors, molecule-based biosensors, cell-based biosensors), transduction methods(Optical, Electrostatic, Electromagnetic, Capacitive, Piezoelectric, piezoresistive etc.), Microactuators : Electromagnetic and Thermal microactuation, Mechanical design of microactuators, Microactuator examples,-microvalves, micropumps, micromotors- Microactuator systems : eg. Ink-Jet printer heads, Micro-mirror TV Projector. Introduction to interfacing methods: bridge circuits, Programmable gain instrumentation amplifiers, A/D and D/A converters, microcontrollers Applications and case studies: Microsensors and actuators in environmental sensing, RF/Electronics devices, Optical/Photonic devices, microsensors for space applications, MEMS sensors in navigation systems, radiation sensors, Medical devices, Bio-MEMS