Syllabus

Introduction and historical background, Micro sensors : Sensors and characteristics, Integrated Smart sensors, Sensor Principles/classification-Physical sensors (Thermal sensors, Electrical Sensors, tactile sensors, accelerometers, gyroscopes , Proximity sensors, Angular displacement sensors, Rotational measurement sensors, pressure sensors, Flow sensors, MEMS microphones etc.), Chemical and Biological sensors (chemical sensors, molecule-based biosensors, cell-based biosensors), Electromagnetic,Capacitive, Electromagneticand transduction Piezoelectric, Thermal piezo micro methods (Optical, resistive actuation, etc.), Micro Mechanical Electrostatic, actuators design : of micro actuators, Micro actuator examples,-micro valves, micro pumps, micro motors- Micro actuator systems : eg. Ink-Jet printer heads, Micro-mirror TV Projector. Introduction to interfacing methods: bridge circuits, Programmable gain instrumentation amplifiers, A/D and D/A converters, microcontrollers Applications and case studies: Micro sensors and actuators in environmental sensing, RF/Electronics devices, Optical/Photonic devices, micro sensors for space applications, MEMS sensors in navigation systems, radiation sensors, Medical devices, Bio-MEMS