Syllabus
Introduction and historical background, Microsensors : Sensors and characteristics, Integrated Smart sensors, Sensor Principles/classification-Physical sensors ( Thermal sensors, Electrical Sensors, tactile sensors, accelerometers, gyroscopes , Proximity sensors, Angular displacement sensors, Rotational measurement sensors, pressure sensors, Flow sensors, MEMS microphones etc.), Chemical and Biological sensors (chemical sensors, molecule-based biosensors, cell- based biosensors), transduction methods(Optical, Electrostatic, Electromagnetic, Capacitive, Piezoelectric, piezo resistive etc.), Micro actuators : Electromagnetic and Thermal micro actuation, Mechanical design of micro actuators, Microactuator examples,-micro valves, micropumps, micrometers- Microactuator systems : eg. Ink-Jet printer heads, Micro-mirror TV Projector. Introduction to interfacing methods: bridge circuits, Programmable gain instrumentation amplifiers, A/D and D/A converters, microcontrollers
Applications and case studies: Micro sensors and actuators in environmental sensing, RF/Electronics devices, Optical/Photonic devices, micro sensors for space applications, MEMS sensors in navigation systems, radiation sensors, Medical devices, Bio-MEMS
Text Books
Same as Reference
References
1. Micromechanical Transducers: Pressure sensors, accelrometers, and gyroscopes, M.-H. Bao, Elsevier, New York, 2000
2. Microsensors, Richard S. Muller, Roger T. Howe, Stephen D. Senturia, RosemaryL. Smith, and Richard M. White, IEEE Press, IEEE Number PC 0257-6, ISBN 0-87942- 254-9, New York, 1991.
3. Micromechanics and MEMS: Classic and Seminal Papers to 1990, William Trimmer, IEEE Press, IEEE Number PC4390, ISBN 0-7803-1085-3, New York.
4. Mechanical Measurements, Beckwith T. G., Margoni R. D., Lienhard J. H. New York: Addison-Wesley Pub. Co, 1995
5. Micro and Smart Systems, G. K. Ananthasuresh, K. J. Vinoy, S. Gopalakrishnan, K.N. Bhat, and V. K. Aatre, Wiley-India, 2010.