Syllabus

Introduction to RF MEMS, Electrical and mechanical modelling of MEMS devices, MEMS Switches: Introduction to MEMS switches; Capacitive shunt and series switches: Physical description, circuit model and electromagnetic modelling; Techniques of MEMS switch fabrication and packaging; Design of MEMS switches. RF Filters and Phase Shifters: Modeling of mechanical filters, micro machined filters, surface acoustic wave filters, micro machined filters for millimeter wave frequencies; Various types of MEMS phase shifters; Ferroelectric phase shifters. MEMS Varactor, MEMS Resonators micro machined waveguide components; Micro machined antennas: Micromachining techniques to improve antenna performance, reconfigurable antennas. Integration and Packaging for RF MEMS: Role of MEMS packages, types of MEMS packages, module packaging, packaging materials and reliability issues.