Syllabus
Intro to MMIC, Processing & Layers, Passive MMIC Elements & Models, Active MMIC Elements & Models Biasing, Amplifiers.
Introduction to MMICs. Technologies: GaAs/Si/InP: MESFET HEMT BJT HBT. Applications, Circuit basics. Fabrication Technology. MMIC components, Active devices, Passive lumped elements, Micro strip elements.
Introduction: RF MEMS for microwave applications, MEMS technology and fabrication, mechanical modelling of MEMS devices, MEMS materials and fabrication techniques.
MEMS Switches: Introduction to MEMS switches; Capacitive shunt and series switches: Physical description, circuit model and electromagnetic modelling; Techniques of MEMS switch fabrication and packaging; Design of MEMS switches.
RF Filters and Phase Shifters: Modeling of mechanical filters, micro machined filters, surface acoustic wave filters, micro machined filters for millimeter wave frequencies; Various types of MEMS phase shifters; Ferroelectric phase shifters.
Transmission Lines and Antennas: Micro machined transmission lines, losses in transmission lines, coplanar transmission lines, micro machined waveguide components; Micro machined antennas: Micromachining techniques to improve antenna performance, reconfigurable antennas.
Integration and Packaging: Role of MEMS packages, types of MEMS packages, module packaging, packaging materials and reliability issues.
Text Books
Same as Reference
References
1. RF MEMS and their Applications, Varadan, V.K., Vinoy, K.J. and Jose, K.J., John iley & Sons. 2002.
2. MEMS: Theory design and Technology, Rebeiz, G.M., John iley & Sons. 1999.
3. RF MEMS Circuit design for wireless Communications, e Los Santos, H.J, Artech House. 1999
4. Micromechanics & MEMS, Trimmer, IEEE Press.
5. Fundamentals of Microfabrication, Madou, M., CRC Press.
6. Semiconductor Sensors, Sze, S.M., John Wiley & Sons, 1994.