Syllabus
Module 1: Microelectronics Device and Process Simulation Syllabus This module focuses on the simulation of fabrication processes and the microelectronics devices such as short channel MOSFET etc. using TCAD tools for Micro and nanoelectronic devices. The process simulation enables one to experiment with the device fabrication flow. The device simulation involves simulating the electrical characteristics of a process simulated/fabricated device.
Module 2: Microfabrication and characterization 1. Familiarization of Microfabrication environment in clean room 2. Familiarization of different unit processes, Fabrication of MOS Capacitor 3. Electrical characterization: High frequency capacitance-voltage measurement (HFCV) and High frequency capacitance-voltage measurement (LFCV), I-V and reliability measurements, parameter extraction of MOS devices, M-S and P-N junction devices
Text Books
References
Course Outcomes (COs):
CO1: Gain hands-on experience with the fabrication, characterization, and analysis of microelectronic devices such as MOSFETs, BJTs, diodes, and capacitors, understanding the physical principles and operation of these devices through practical experiments.
CO2: Develop skills in various microfabrication techniques, including photolithography, etching, doping, oxidation, and thin-film deposition.
CO3: Perform I-V, C-V, and other characterization techniques to evaluate device performance and extract key parameters.
CO4: Summarize the work, results and inferences as a concise report