Course
PostgraduateSemester
ElectivesSubject Code
AVM612Subject Title
Introduction to Micro Electro Mechanical SystemsSyllabus
History of Microsystem Technology with overview on commercial products, Scaling laws, Microelectronic technologies for MEMS ,Materials and processing for MEMS, Micromachining modelling: Technology: Mechanics of Surface and microsystems, Bulk Micromachining, Transduction Microsystem Mechanisms (optical, piezoelectric, piezo resistive etc.), MEMS Micro sensors, and applications.
Text Books
Same as Reference
References
1. S. D. Senturia, Microsystem Design, 2005
2. Chang Liu, Foundations of MEMS Pearson
3. Minhang Bao, Analysis and Design Principles of MEMS Devices.
4. Marc Madau, Fundamentals of Microfabrication Science of Miniaturization, CRC Press