Syllabus

 I. Introduction to MEMS and MOEMS

Introduction to MEMS Technology and Applications Introduction to sensing and actuation principles, applications, various types of sensors and actuators Open loop and closed loop systems Materials used for MEMS fabrication and reasons to select them

Design of Microstructures with specific case studies like accelerometers, gyroscopes, RF switches Silicon micromachining and its opportunities

II. MEMS Devices: Fabrication and Technologies

Types of micromachining and device architecture: Bulk, surface, LIGA, Silicon on Glass

Types of wafers and wafer selection approach for microfabrication

Various processes for microfabrication

Process technologies and machines for fabrication like Lithography, Wet and dry etching, Deep Reactive Ion etching, wafer bonding techniques, thin film deposition technologies, oxidation

Characterization and process recipe development approaches

III. Characterization, Packaging, Calibration and Reliability assurance of MEMS products

Performance testing of microdevices

Technologies used for inspecting and characterizing devices – vibrometers, surface profilers, SEM

Integration of readout electronics to MEMS

Technologies for packaging of MEMS devices

The importance of calibrating an instrument

Approach for calibration of devices like pressure sensor and accelerometers

Reliability assurance approaches, Failure modes, Failure mode and effects analysis, Quality assurance tests

IV. MEMS and MOEMS devices for Aerospace, Biomedical and Industrial applications

Specific case studies for development and use of MEMS devices in space applications – sensors, actuators, science payloads

MEMS based products in thermal engineering, microfluidics, biomedical applications

Products based on MOEMS technology, micro-optic components and their applications

Role of MEMS in IoT, Industrial Applications