Syllabus
Module 1: Design and simulation
This module focuses on design and simulation aspects of sensors, actuators and sensor systems. The laboratory course provides an overview of numerical and analytical modelling and design of microsystems using leading software in the field such as Coventor, MEMS+ or COMSOL Multiphysics for MEMS
Module 2: Fabrication and characterization of MEMS devices
1. Familiarization of unit processes and Fabrication of MEMS structures such as Micro cantilever beam/suspended membrane etc.
2. Characterization (Electrical, Mechanical and Electromechanical) of MEMS structures
Text Books
References
List same as that for the theory courses on MEMS and Thin films
Course Outcomes (COs):
CO1: Develop proficiency in using advanced TCAD softwares such as coventor, MEMS+ or COMSOL multiphysics.
CO2: Understanding various unit processes for the fabrication of MEMS structures.
CO3: Apply design methodologies for fabricating and characterizing MEMS devices.
CO4: Summarize the work, results and inferences as a concise report