Course
PostgraduateSemester
Sem. ISubject Code
AVM612Subject Title
Introduction to Micro Electro Mechanical Systems (MEMS)Syllabus
Broad-stroke overview – History of Microsystem Technology with overview on commercial products, Sensing & Actuation Principles of Microsystems, Applications-MEMS Materials and Fabrication Technology Microelectronic technologies for MEMS, Micromachining Technology: Surface and Bulk Micromachining, -Design and modelling of MEMS/Microsystem: Mechanics of MEMS/Microsystems- Elasticity-Stress/strain analysis of beams, membranes etc., thin film stress-Dynamics of Microsystems MEMS Transduction Mechanisms: Optical, piezoelectric, piezoresistive, FET based transduction etc. MEMS sensors and applications and case studies
Text Books
Same as Reference
References
1.Microsystem Design, S. D. Senturia, 2005.
2.Foundations of MEMS, Chang Liu, Pearson Publication.
3.Analysis and Design Principles of MEMS Devices, Minhang Bao.
4.Fundamentals of Micro fabrication Science of Miniaturization, Marc Madau, , CRC Press.
5. Micro and Smart Systems Technology and Modeling, G. K. Ananthasuresh, K. J. Vinoy, S. Gopalakrishnan, K. N. Bhat , V. K. Aatre , 2012.
6. Peer reviewed international journals such as IEEE/ASME Journal of MEMS, IOP Journal of Micromechanics and Microengineering, IOP Journal of Nanotechnology, Elsevier Sensors and Actuators etc. and conference proceedings such as IEEE MEMS, IEEE Nanotechnology, Transducers etc
Course Outcomes (COs):
CO1: Gaining basic understanding of Microsystem Technology, sensing and actuation.
CO2: Strengthen the theoretical concept of MEMS materials, fabrication techniques, micromachining.
CO3: Ability to design and model MEMS systems.
CO4: Understanding various transducing mechanisms.